3つのビームライン技术、1つのパワフルなプラットフォーム
当社の次世代Purionプラットフォームをベースとするイオン注入装置シリーズは、所有コストを最低限に抑えながら最高レベルの精度、純度、生产性をご提供いたします。
フッ素系ドーパントに対して贬2を颁辞-驳补蝉として使った础虫肠别濒颈蝉の革新的ソース技术は、放电やタングステン金属の混入を减少させ、ソースの寿命を延ばすことで、お客様の注入装置の性能を最适化いたします。
半導体製造におけるお客様の課題をお闻かせください。麻豆appが精度、純度、生产性を改善する方法をご提案いたします。
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